The dependence of etching rate and profile on the vacuum pressure, RF pow-er, gas composition and flow rate, and electrode temperature is analyzed.
分析了真空压力、射频功率、气体组合及其流量和电极温度对刻蚀速率、刻蚀剖面的影响；
Objective Study the short period treatment of Hepatocellular carcinoma (HCC) by clustered electrode of radio frequence (RF) system.
目的研究集束电极射频治疗系统对肝癌治疗的近期疗效。
The geometry of the pipe shaped extraction electrode of the RF ion source may strongly affect the extracted ion beam.
高频离子源管道式引出电极的几何参数对束流引出具有重要影响。
应用推荐