The dependence of etching rate and profile on the vacuum pressure, RF pow-er, gas composition and flow rate, and electrode temperature is analyzed.
分析了真空压力、射频功率、气体组合及其流量和电极温度对刻蚀速率、刻蚀剖面的影响；
Objective Study the short period treatment of Hepatocellular carcinoma (HCC) by clustered electrode of radio frequence (RF) system.
目的研究集束电极射频治疗系统对肝癌治疗的近期疗效。
The geometry of the pipe shaped extraction electrode of the RF ion source may strongly affect the extracted ion beam.
高频离子源管道式引出电极的几何参数对束流引出具有重要影响。
Furthermore, we study the effects of various rf frequency on the voltage at the electrode, the sheath width, the IED and IAD impinging on the rf-biased electrode.
进一步，研究了射频频率对极板电位、鞘层宽度、极板上入射离子的能量分布和角度分布的影响。
The results show that compared with parallel electrode method, RF resonance method has advantages such as shorter extraction time, lower collision loss and sputtering loss and higher collection ratio;
模拟结果表明，RF共振法与平行板静电场法相比，引出时间较短，碰撞损失和溅射损失较低，收集率较高；
The results show that compared with parallel electrode method, RF resonance method has advantages such as shorter extraction time, lower collision loss and sputtering loss and higher collection ratio;
模拟结果表明，RF共振法与平行板静电场法相比，引出时间较短，碰撞损失和溅射损失较低，收集率较高；
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