Photolithographic process [电子] 光刻工艺
photolithographic mask 光刻用掩模
photolithographic resolution 光刻蚀清晰度
photolithographic mask layer [电子] 光刻掩蔽层 ; 光刻遮罩层
photolithographic diffusion windows 光石版印刷扩散窗 ; 凹版印刷法
photolithographic diffusion window [电子] 光刻扩散窗口 ; 光刻扩散窗
photolithographic masking operation [电子] 光刻掩蔽工序
The structure and basic theory of the electrical control system of the precision workbench. It is applied in quasi-molecular laser photolithographic technology.
本文论述了精密工作台电控系统的结构及工作原理，它主要应用于准分子激光光刻技术中。
参考来源 - X—Y精密工作台电控系统的研制·2,447,543篇论文数据，部分数据来源于NoteExpress
The structure of micro cantilever bridge, the photolithographic mask and the circuit system of the sensor is designed.
从理论上阐述了微悬桥结构气体流速传感器的工作原理，设计了微悬桥的结构、工艺版图以及其电路系统。
Integration of the system is described, the characteristics of the photolithographic imaging system are analyzed in detail.
介绍了光刻投影系统的组合集成，详细分析了该系统的成像特点及光学性能。
The excimer laser as the main light source of photolithographic device, whose energy distribution is required as homogeneous as possible.
准分子激光作为当前光刻装置的主要光源，要求其输出激光光束强度分布尽量均匀。
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