Non-contact capacitance micrometer technology is a new important technique of micro/nanometer measurement, which has developed rapidly in recent years.
非接触式电容测微技术是微/纳米测量新技术中重要的一种,在近年来得到迅速发展。
参考来源 - 精密位移、振动测量的电容法研究·2,447,543篇论文数据，部分数据来源于NoteExpress
Nanometer measurement technology is one of the preconditions to solve many current and future problems of high accuracy and resolution.
纳米级计量技术是解决目前和未来许多高精度、高分辨力问题的先决条件之一。
To compensate of the nonlinearity error of heterodyne interferometers in nanometer measurement, a method for reducing the first harmonic nonlinearity is proposed.
为了补偿激光外差干涉纳米测量中的非线性误差，提出了一种减小非线性误差的一次谐波方法。
It is an objective for nanometer instrument researcher to improve the measurement precision of scanning probe microscope (SPM), the eye and hand of nanometer science and technology.
提高作为纳米科技的“眼”和“手”的扫描探针显微镜(SPM)的测量和定位精度，是纳米仪器界始终追求的目标。
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