A nanometer system for displacement measurement is described, which is based on the principle of optical lever.
介绍了一种基于光杠杆原理的光学微位移测量系统。
In this dissertation, the technologies are studied which correlate to grating displacement measurement system with long-range displacement and nanometer resolution.
本文主要就大量程纳米级光栅位移测量系统的关键技术进行研究。
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