运用薄膜沉积技术，制作了薄膜应变栅式称重传感器。
The thin-film strain-gauge weighing sensors were fabricated by thin film techniques.
设计了一种以多晶硅薄膜作为振动膜片的电容式硅微声传感器。
A capacitive micro-acoustic sensor with a polysilicon film as diaphragm was designed in this paper.
多晶硅薄膜良好的压阻特性使其在MEMS压阻式传感器中得到了广泛应用。
Polysilicon films, due to its favourable piezoresistive properties, have been widely applied in MEMS piezoresistive sensors.
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