运用薄膜沉积技术，制作了薄膜应变栅式称重传感器。
The thin-film strain-gauge weighing sensors were fabricated by thin film techniques.
设计了一种以多晶硅薄膜作为振动膜片的电容式硅微声传感器。
A capacitive micro-acoustic sensor with a polysilicon film as diaphragm was designed in this paper.
多晶硅薄膜良好的压阻特性使其在MEMS压阻式传感器中得到了广泛应用。
Polysilicon films, due to its favourable piezoresistive properties, have been widely applied in MEMS piezoresistive sensors.
结合目前湿度传感器的研究现状，以及在线监测的具体要求，选择了聚酰亚胺薄膜电容式湿度传感器作为微水含量监测传感器。
Considering the study status of sensors and the requirement of on-line monitoring, the polyimide-based capacitive humidity sensor is selected as moisture sensor.
这种便携式平面电化学生物传感器采用金薄膜两电极系统；先后修饰纳米铂黑粒子层和铁氰化钾媒介体。
The planar electrochemical biosensor was fabricated with gold thin-film two-electrode system, and modified with platinum-black nano-particles and ferricyanide mediator.
这种便携式平面电化学生物传感器采用金薄膜两电极系统； 先后修饰纳米铂黑粒子层和铁氰化钾媒介体。
The planar electrochemical biosensor was fabricated with gold thin-film two-electrode system, and modified with platinum-black nano-particles and ferricyanide mediator.
这种便携式平面电化学生物传感器采用金薄膜两电极系统； 先后修饰纳米铂黑粒子层和铁氰化钾媒介体。
The planar electrochemical biosensor was fabricated with gold thin-film two-electrode system, and modified with platinum-black nano-particles and ferricyanide mediator.
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