结合六氟化钨的性质，对六氟化钨中的金属粒子进行分析。
This paper analyzes metal particles in WF6 according to the special characteristic of WF6.
介绍了国外六氟化钨的制备和精制工艺进展，重点描述了电子工业中应用的高纯度六氟化钨的制备工艺。
The progresses of preparation and purification of tungsten hexafluoride, especially the preparation of high purity tungsten hexafluoride used in the electronic industry, are introduced.
同时介绍了六氟化钨的性质、产品规范、应用及经济等方面的状况，评述了六氟化钨在国内外的发展前景。
And the property, product specifications, application and economics of tungsten hexafluoride are described. The development prospect of tungsten hexafluoride is also reviewed.
应用推荐