高灵敏度的氟里昂气体传感器是检测氟里昂泄漏的关键元件,本文叙述了氟里昂气敏器件的制作工艺、敏感原理、测试方法及测试结果。
Freon sensor with high sensitivity is key device for detecting freon leak. The manufacture technology, sensitivity mechanism, measure method and parameter of samples have beendiscribed in this paper.
对其灵敏度特性曲线的研究表明:该器件不仅对低浓度氧气敏感,而且对高浓度氧气也敏感;
Investigation in the Characteristic curve of sensitivity indicated that the devices are susceptible to not only low concentration oxygen but also high concentration oxygen.
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