高灵敏度的氟里昂气体传感器是检测氟里昂泄漏的关键元件，本文叙述了氟里昂气敏器件的制作工艺、敏感原理、测试方法及测试结果。
Freon sensor with high sensitivity is key device for detecting freon leak. The manufacture technology, sensitivity mechanism, measure method and parameter of samples have beendiscribed in this paper.
对其灵敏度特性曲线的研究表明：该器件不仅对低浓度氧气敏感，而且对高浓度氧气也敏感；
Investigation in the Characteristic curve of sensitivity indicated that the devices are susceptible to not only low concentration oxygen but also high concentration oxygen.
对其灵敏度特性曲线的研究表明：该器件不仅对低浓度氧气敏感，而且对高浓度氧气也敏感；
Investigation in the Characteristic curve of sensitivity indicated that the devices are susceptible to not only low concentration oxygen but also high concentration oxygen.
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