提出了一种平行板静电场的改进方法，大大降低了溅射损失，提高了。

Improving the parallel electrode method leads to decreasing sputtering loss and increasing collection ratio greatly.

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模拟结果表明，RF共振法与平行板静电场法相比，引出时间较短，碰撞损失和溅射损失较低，收集率较高；

The results show that compared with parallel electrode method, RF resonance method has advantages such as shorter extraction time, lower collision loss and sputtering loss and higher collection ratio;

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