提出了一种平行板静电场的改进方法,大大降低了溅射损失,提高了。
Improving the parallel electrode method leads to decreasing sputtering loss and increasing collection ratio greatly.
模拟结果表明,RF共振法与平行板静电场法相比,引出时间较短,碰撞损失和溅射损失较低,收集率较高;
The results show that compared with parallel electrode method, RF resonance method has advantages such as shorter extraction time, lower collision loss and sputtering loss and higher collection ratio;
模拟结果表明,RF共振法与平行板静电场法相比,引出时间较短,碰撞损失和溅射损失较低,收集率较高;
The results show that compared with parallel electrode method, RF resonance method has advantages such as shorter extraction time, lower collision loss and sputtering loss and higher collection ratio;
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