Diamond-like carbon films DLC薄膜 ; 类金刚石薄膜 ; 碳膜 ; 由于类金刚石薄膜
amorphous carbon films 非晶态碳膜的
amorphous silicon carbon films 非晶氢化硅碳薄膜
amorphous fluorinated carbon films 氟化非晶碳薄膜
carbon-films 碳膜
nano-carbon films 碳纳米薄膜
diamond carbon films 金刚石薄膜
At same time,the substrate temperature has a significantly effect on the nitrogen content and the structure of the films. Increasing substrate temperature(300℃) would decrease the content of nitrogen in the films and result in a formation of carbon films.
基片温度对薄膜中氮的含量和薄膜的结构有很大的影响,基片温度提高后(300℃)薄膜中氮的含量降低,薄膜结构由氮化碳多晶薄膜转变为石墨为主的碳膜。
参考来源 - 氮化碳的制备研究·2,447,543篇论文数据，部分数据来源于NoteExpress
The methods reduce or prevent plasma-induced charge damage to the substrates from the deposition of the amorphous carbon films.
这些方法减少或防止等离子体感应电荷由于无定形碳薄膜的沉积而损坏衬底。
We have developed a new process for building up thick and stable amorphous carbon films with high hardness and low internal stress.
本文研究了一种制备高硬度、低内应力、厚度高且热稳定性良好的非晶碳薄膜的方法。
Using an alternating high- and low-bias voltage, we have formed hydrogen-free multilayers of hard and soft diamond-like carbon films.
本文采用交替施加高偏压和低偏压的方法，合成出了具有软膜和硬膜结构的无氢类金刚石多层膜。
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