...关键词：DLC薄膜；氮掺杂；俄歇电子能谱；电子结构；光学带隙；sp2键与sp3键比率 [gap=1324]Keyword：Diamond-like carbon films; nitrogen doping; AES;electronic structure;optical band gap; the ratio of sp2 ..
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【摘要】： 正 碳膜因结构和性能类似金刚石,故也称类金刚石薄膜(Diamond-like Carbon Films)简称“DLC”膜。它具有硬度高、绝缘性能好、红外与可见光透明性好及高化学惰性等特殊性能,而且日益受到人们的重视。
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若依氢之含量又可 分为: 【a】 类钻碳膜(Diamond-like carbon films):薄膜中不 含氢或含氢量在 1 ﹪以内者。其结晶结构有单晶、 复晶、含微晶与非晶质等。
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...应用综述 赵茜 陈泽祥 电子科技大学光电信息学院 四川成都610054 摘要： 由于类金刚石薄膜（Diamond-like Carbon films，DLC）多样的物理、化学性质，对DLC的研究也日益成为热点。
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diamond-like carbon films dlc 类金刚石膜
diamond like carbon films dlc 类金刚石膜
dlc diamond-like carbon films 类金刚石碳膜
doped diamond-like carbon films 掺杂类金刚石薄膜
diamond-like carbon films deposited 类金刚石涂层
fluorinated diamond-like carbon films 氟化类金刚石膜
b-doping diamond-like carbon films 硼掺杂类金刚石薄膜
diamond and diamond-like carbon films 金刚石和类金刚石膜
nonmetal doped diamond-like carbon films 非金属掺杂类金刚石膜
Using an alternating high- and low-bias voltage, we have formed hydrogen-free multilayers of hard and soft diamond-like carbon films.
本文采用交替施加高偏压和低偏压的方法，合成出了具有软膜和硬膜结构的无氢类金刚石多层膜。
Diamond-like carbon DLC thin films were deposited onto si 100 and high speed steel substrates by mid-frequency magnetron sputtering system SP0806AS, Beijing Power tech Co.
采用SP0806AS中频磁控溅射镀膜机，在硅(100)和高速钢基体上，采用双石墨靶在不同功率下沉积了类金刚石薄膜。
Smoothing, dense and uniform nano crystalline diamond like carbon films are prepared by using electron cyclotron resonance (ECR) microwave acetone plasma chemical vapor deposition (CVD) method.
利用电子回旋共振（ECR）微波等离子体辅助化学气相沉积技术、工作气氛为丙酮，在光学玻璃衬底上得到了光滑、致密、均匀的类金刚石薄膜。
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