在涡轮分子泵的前级侧充气，能强制使碳氢化合物立刻通过涡轮分子泵流入真空室。
Turbo molecular pump in the first grade side of the inflatable, can force the hydrocarbons into the immediate adoption of turbo-molecular pump chamber.
综述了涡轮分子增压泵的研究现状与进展。
The present situation and advance in development of a spiral grooved turbo booster pump are reviewed.
综述了涡轮分子增压泵的研究现状与进展。
The present situation and advance in development of a spiral grooved turbo booster pump are reviewed.
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