本文介绍了在AFM针尖与氢钝化硅表面之间施加电场作用对硅表面进行修饰的纳米加工方法，重点讨论了加工机理。
In the paper a kind of patterning method was studied with voltage applied between the AFM tip and sample with emphasis on its mechanism.
先沉积氮化硅薄膜再氢等离子体处理能得到更好的钝化效果。
Depositing SiNx thin film followed by hydrogen plasma treatment will result in better passivation effect.
氢等离子体退火对电活性的位错态有显著的钝化作用。
They can be passivated with hydrogen plasma annealing and reactivated by subsequent thermal annealing in vacuum.
采用电化学、光电化学和交流阻抗等方法研究了氢对纯铁钝化膜形成过程和电子性质的影响。
Pure iron membranes were pre-charged with hydrogen at various current densities. Effect of hydrogen on the film formation process on iron was studied by electrochemical methods.
采用电化学、光电化学和交流阻抗等方法研究了氢对纯铁钝化膜形成过程和电子性质的影响。
Pure iron membranes were pre-charged with hydrogen at various current densities. Effect of hydrogen on the film formation process on iron was studied by electrochemical methods.
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