介绍了氮化硅球的加工工艺过程。
The technology procedure of silicon nitride ball is introduced.
氮化硅是优良的陶瓷材料，应用广泛。
第四章介绍了氮化硅的制备方法和测试方法；
The fourth chapter introduce the deposition and test method of SiNx ;
第四章介绍了氮化硅的制备方法和测试方法；
The fourth chapter introduce the deposition and test method of SiNx ;
应用推荐