A micron-precision optical alignment system is developed for three-dimensional Micro Electro-Mechanical System(MEMS) device fabrication based on multi-layer imprint lithography.
针对基于微压印成形三维MEMS器件制造工艺多层压印的需要，开发了一套基于视频图像对正原理的压印光刻对准系统。
The transient characteristics of the dynamic stress of MEMS (Micro Electro Mechanical system) decides that it is hard to be measured directly by using the traditional stress measurement system.
微机电系统(MEMS)动态应力的瞬态特性决定了传统的应力测试系统无法直接满足它的测试需要。
The invention relates to a structure for increasing strength and service life of a deformable beam and an application thereof, belonging to the field of micro-electronic mechanical system (MEMS).
本发明涉及一种增加变形梁强度和使用寿命的结构及其应用，属于微电子机械系统(MEMS)领域。
This is a typical optical, mechanical, electronic and calculated integral system and can be applied to the geometry and dynamic measurement of MEMS microstructure.
该系统是一个典型的光、机、电、算集成的MEMS测试系统，已应用于MEMS微结构几何尺寸和动态特性等的测量。
Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
This paper presents the basic concept of the microelectronic mechanical system (MEMS), its future applications in medical fields and its key technologies.
介绍了微机电系统的基本概念和医用微机电系统的应用前景及其关键技术。
A hair cell vector hydrophone based on micro electro mechanical system (MEMS) was presented in this paper.
提出了一种纤毛式微机电系统(MEMS)矢量水声传感器的仿生组装技术。
Micro adhesive bonding technology shows great potential in the assembly of micro-electro-mechanical system (MEMS) products.
微胶接技术非常适用于微机电系统产品的自动化装配过程。
A differential laser Doppler system is built to measure the in-plane movement of micro-electro-mechanical systems (MEMS), and the vibration of a MEMS resonator has been measured.
建立了用来检测微机电系统谐振器面内运动的激光差动多普勒系统，测量了谐振器的振动速度。
MEMS (micro electro mechanical system) is a new field which has a lot of advantages: small volume, light weight, low energy consumption, fast response, big batch and low cost etc.
微型机电系统是一个新兴的技术领域，其主要优点是体积小、重量轻、能耗少、响应快、大批量、成本低等，有广泛的应用前景。
Micro Electro Mechanical System (MEMS) is a course of new technology rising in recent years. Micro planetary gear reducer is the important part in MEMS.
微机电系统(MEMS)是近年来兴起的一门新兴技术，微行星齿轮减速器是微机电系统中的重要器件。
As the rapid development of MEMS technology, the application demand of micro parts for various kinds of products in micro mechanical system is growing.
随着MEMS技术的飞速发展，微型塑件在各种微型机电产品中的应用需求越来越多。
Potting is a key step for the packaging of high-g micro-electro-mechanical system(MEMS) accelerometer.
灌封是高量程微机械加速度计实用化的一个关键步骤。
The micro electro mechanical system(MEMS) is a new developed subject with a broad range in applications, and microfabrication process sequences is a key technology for the realization of the MEMS.
微机电系统是具有广泛应用前景的新兴学科，微加工工艺是实现微机电系统的关键技术。
Therefore, embedding nerve prosthesis prepared by micro electronic mechanical system (MEMS) technique as treatment for peripheral nerve damage has been dug deeper in animal and clinical study.
因此，应用微机电系统技术制备的可植入神经假体治疗周围性神经损伤疾病在动物研究和临床工作得到进一步的深入。
MEMS(Micro Electronic Mechanical System) accelerometers have wide applications in gauge check.
MEMS加速度传感器在计量检测中有着广泛的应用。
Micro-electro-mechanical system(MEMS); Accelerometers; Microstructure; Stiffness; Force method; Principle of work and strain energy;
微机电系统；加速度传感器；微结构；刚度；力法；功能原理；
Objective To observe the growing shape and function of Madin-Darby canine kidney (MDCK) cells implanted on the polysilicon nanopore membrane by micro-electro-mechanical system (MEMS).
目的 利用多晶硅纳米孔技术人工合成一种多孔隙薄膜，并在薄膜上培养狗肾脏细胞（MDCK），观察细胞生长情况及膜的生物相容性。
With the development of the Micro Electro-Mechanical System(MEMS), it becomes possible for microneedles array to strengthen the transdermal drug delivery.
利用微针阵列实行局部定时地释放药物、控制药量，微针阵列的研制是微驱动器的关键。
At present, the Micro-Electro-Mechanical System (MEMS) is widely applied as the actuators and sensors in the aeronautics and astronautics.
目前，微机电系统(MEMS)作为致动器和传感器已被广泛应用于航空航天领域中。
At present, the Micro-Electro-Mechanical System (MEMS) is widely applied as the actuators and sensors in the aeronautics and astronautics.
目前，微机电系统(MEMS)作为致动器和传感器已被广泛应用于航空航天领域中。
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