Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
This paper presents the basic concept of the microelectronic mechanical system (MEMS), its future applications in medical fields and its key technologies.
介绍了微机电系统的基本概念和医用微机电系统的应用前景及其关键技术。
A hair cell vector hydrophone based on micro electro mechanical system (MEMS) was presented in this paper.
提出了一种纤毛式微机电系统(MEMS)矢量水声传感器的仿生组装技术。
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