The air foot, wafer supporting stage system, the design and calculating methods of STAMP are discussed, the design data and calculating results are given.
讨论了气足、承片台系统及STAMP的设计和计算方法，并给出了设计数据与计算结果。
The air foot, wafer supporting stage system, the design and calculating methods of STAMP are discussed, the design data and calculating results are given.
讨论了气足、承片台系统及STAMP的设计和计算方法，并给出了设计数据与计算结果。
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