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Various CVD technologies for preparing low dielectric constant materials in ULSI circuits are summarized.
综述了制备uls I低介电常数材料的各种CVD技术。
youdao
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Various CVD technologies for preparing low dielectric constant materials in ULSI circuits are summarized.
综述了制备uls I低介电常数材料的各种CVD技术。
youdao