The behavior of oxidation-induced stacking faults (OSF) in NCZ and CZ silicon single crystal was investigated.
采用直拉法生长普通和掺氮硅单晶,研究不同含氮浓度的晶体中氧化诱生层错(OSF)的行为。
The behavior of oxidation-induced stacking faults (OSF) in NCZ and CZ silicon single crystal was investigated.
采用直拉法生长普通和掺氮硅单晶,研究不同含氮浓度的晶体中氧化诱生层错(OSF)的行为。
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