Wafer pairs with bonding interface being native oxide or thermal oxide have different bonding behavior in the annealing process, which were investigated and compared.
将硅本征氧化层与硅热氧化层两种键合界面在退火过程中的行为进行了理论分析与比较。
A three layer of aluminum exposed to atmosphere is identified: the aluminum and its native oxide, the corrosion layer atop oxide aluminum, and a surface contamination layer.
暴露于大气中的铝表面呈现三层结构，即氧化铝和氢氧化铝层、其上的腐蚀产物层和最上层的污染物沉积形成的污染物层。
A three layer of aluminum exposed to atmosphere is identified: the aluminum and its native oxide, the corrosion layer atop oxide aluminum, and a surface contamination layer.
暴露于大气中的铝表面呈现三层结构，即氧化铝和氢氧化铝层、其上的腐蚀产物层和最上层的污染物沉积形成的污染物层。
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