薄膜先以微影及蚀刻制程制作出金属线路，线路之间则填入二氧化矽。
The lithographic and etching process for a membrane creates a mesh of metal wires with silicon dioxide filling the space between them.
薄膜先以微影及蚀刻制程制作出金属线路，线路之间则填入二氧化矽。
The lithographic and etching process for a membrane creates a mesh of metal wires with silicon dioxide filling the space between them.
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