本文评述的混合光纤传感器类型范围涉及：电源驱动、光源驱动、硅微技术。
This paper refer hybrid sensor types to activation of power supply, activation of light source, silicon microtechnology.
本文研制的体硅工艺微振动传感器，其敏感单元为叉指电极结构，弹性梁采用新颖的多级折梁结构。
The sensing element of the bulk machining vibration sensors is consisted of comb electrodes, and its elastic beams are novel multi-folding beams.
对硅基锆钛酸铅(PZT)压电薄膜微传感器进行了结构和版图设计。
The structural and territorial design of PZT thin film micro-sensors is processed.
多孔硅由于其独特的物理、化学和光学性能及技术优势，已经在微传感器领域得到广泛的应用。
Porous silicon and its preparation technology have been used broadly in the fields of micro-sensors because of its special performance in physics, chemistry and optics.
多孔硅由于其热绝缘特性以及技术优势，已经在微传感器领域得到广泛的应用。
Porous silicon has been used broadly in the fields of micro-sensors because of its special thermal isolation performance and advantages in technology.
对一种硅谐振式压力微传感器敏感结构的边界结构参数进行了优化设计。
The boundary structural parameters of a silicon resonant pressure microsensor are optimized in this paper.
设计了一种以多晶硅薄膜作为振动膜片的电容式硅微声传感器。
A capacitive micro-acoustic sensor with a polysilicon film as diaphragm was designed in this paper.
介绍一种采用硅微电容式加速度传感器作为检测部件，应用智能化数据处理技术制成的便携式汽车制动性能测试仪。
A portable vehicle braking test meter is introduced, which appies the technology of intelligent data processing and whose detect component is silicon capacitate acceleration sensor.
在测量硅微电容式加速度传感器时，由于器件信号的微弱和寄生电容的干扰，提高加速度的稳定性和分辨率非常困难。
Due to the parasitic capacitance and weak output signal, which is limited by its dimensions, it is difficult to improve the resolution and stability of micro accelerometer efficiently.
根据鱼类侧线听觉仿生学原理，设计出硅微仿生矢量水声传感器结构。
According to the auditory principle of fish's stereocilium, a bionic hydrophone based on silicon is designed.
主要论述硅谐振微传感器中微现象测量。
Micro phenomena measurement to silicon resonant microsensor are resented in this paper.
以与IC兼容的硅作为基底材料，利用MEMS加工工艺，采用硅腐蚀及SU8微反应池方法制成了新型微电极传感器。
Using IC-compatible silicon as substrate and MEMS processing technology, it is fabricated with silicon wet etching and SU8 micro reaction pool.
实验表明，采用该集成化结构设计的硅微声传感器，具有高的Q值、高的信噪比及很强的抗干扰能力。
The detail of the production is described. The experiment results show that the micromachine sound sensor with the integral structure is one with high Q-factor, hi…
基于MEMS技术的硅微谐振式压力传感器是目前精度最高的硅微压力传感器，它通过检测物体的固有频率间接测量压力，为准数字信号输出。
Miniature silicon resonant pressure sensor based on MEMS, which has the highest precision for frequency output, measures pressure by detecting the natural frequency of some object.
硅微加速度计是一种重要的力学量传感器，是最早受到研究的微机械惯性传感器之一。
Silicon micro-machined accelerometers are one kind of the most important mechanical accelerometers, and also one of the micro-machined inertial sensors that have been studied from the beginning.
此外，本文也研究了传感器的敏感机理和硅微皮拉尼传感器中气体导热的微尺度效应。
Moreover, the sensing mechanism of the Pirani sensor and the micro-scale thermal conduction of the gas in the silicon-based Pirani sensor have also been investigated in this work.
针对传统的传感器无法进行长期健康监测的不足，研发出一套新型的基于MEMS的硅微电容式传感器。
Aim at the disadvantage of traditional sensor for structural health monitoring for long, a new type of micro capacitive sensor based on MEMS is developed.
第二章详细论述了一种新型的微梁直拉直压硅微机械压阻式加速度传感器的工作原理。
In Chapter 2, the operation scheme of a micromachined piezoresistive accelerometer with axially deformed tiny beams is studied in details.
第二章详细论述了一种新型的微梁直拉直压硅微机械压阻式加速度传感器的工作原理。
In Chapter 2, the operation scheme of a micromachined piezoresistive accelerometer with axially deformed tiny beams is studied in details.
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