介绍一种大功率直流溅射恒流电源的设计。
本工作表明使用贫氧靶材直流溅射制备的高阻透明氧化锌薄膜可以应用于薄膜太阳能电池并有效地降低其成本。
This letter demonstrates that the insulating ZnO films can be deposited by DC sputtering from oxygen-deficient ZnO targets to lower the cost of thin film solar cells.
首先提出真空管道自体真空镀膜新概念，采用特殊的阴极靶结构设计成功的解决了长管道内表面直流溅射镀膜的难题。
The new concept of the vacuum pipe sputter self-coating is introduced first, and special cathode target structure is introduced to get favorable coating.
本论文对真空蒸发法和直流溅射法沉积锌膜的工艺进行了研究，结合XRD、SEM、AFM等分析手段，以探索这两种方法在制备锌膜方面的一般规律。
The techniques of depositing zinc thin film on grass substrate by vacuum evaporation and direct-current sputtering were investigated with XRD, SEM and AFM in this paper.
本论文对真空蒸发法和直流溅射法沉积锌膜的工艺进行了研究，结合XRD、SEM、AFM等分析手段，以探索这两种方法在制备锌膜方面的一般规律。
The techniques of depositing zinc thin film on grass substrate by vacuum evaporation and direct-current sputtering were investigated with XRD, SEM and AFM in this paper.
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