通过对基片加热材料的微波设计，在MPCVD装置中获得大于基片台直径的均匀温度分布区。
By microwave designing for substrate heating materials, the larger uniform temperature field areas than the diameter of substrate holder in MPCVD device is obtained.
通过对基片加热材料的微波设计，在MPCVD装置中获得大于基片台直径的均匀温度分布区。
By microwave designing for substrate heating materials, the larger uniform temperature field areas than the diameter of substrate holder in MPCVD device is obtained.
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