文章提出了一种实用的单晶炉提拉速度控制系统。
This paper proposes a practical speed control system for single crystal furnace lifting mechanism.
分析讨论的结果可供设计MCZ单晶炉的磁场发生装置时参考。
The conclusions can be referenced when the equipment generating magnetic field of MCZ monocrystal furnace is designed.
单晶炉炉室真空密闭性能是衡量单晶炉设备性能好坏的重要因素。
The obturation of vacuum in the crystal grower is one of the most important factors to judge the equipment capability.
研制一种新型谐波齿轮减速器，以满足氧化物单晶炉的高精密要求。
The type of XJ-99 harmonious gear reducer is developed to meet high precise requirement of oxide puller.
研究了动态矩阵控制（DMC）算法在单晶炉热场温度控制系统中的应用。
The principle of dynamic matrix control(DMC) was studied, and the application of DMC algorithm on the temperature control system for thermal field of single crystal growth fumace was given too.
采用自调整因子混合式模糊pid控制方法，对单晶炉的提拉速度进行控制。
A speed control system of single-crystal furnace lifting mechanism based on mixed self-adjusting fuzzy PID controller is introduced in this paper.
直拉单晶炉生长过程中炉膛内真空度的高稳定性对硅单晶正常生长起到很重要的作用。
High stability of vacuum pressure in the hearth of Czochralski (CZ) crystal growing furnace plays a very important role in the normal growth of monocrystalline silicon.
本文采用数值积分法计算MCZ单晶炉内的磁场。文中给出了计算程序框图及数值解。
Numerical integral method to compute magnetic field in MCZ monocrystal furnace is applied and the computing program flowchart and numerical solutions are given in this paper.
对高压带衬里结构单晶炉的密封与结构设计、主要材料选择以及制造、检验作了简要介绍。
A brief introduction of the sealing design, structure design, main material selection, manufacture and inspection for high pressure crystal growing furnace with lining structure is made.
文章针对某单晶拉伸炉的现状及存在的问题，介绍了一种经济实用的单晶炉自动化控制系统。
Aiming at the single crystal growth furnace situation and existing problem, a new style of single crystal growth furnace automatic control system with utility and economic is introduced.
介绍了一种用于稀土金属提纯的单晶炉，根据区熔法提纯单晶的特殊工艺要求，分析了其主要结构及特点。
It is introduced a puller applied to purification of rare earth (RE) material, according to the float zone (FZ) technics of crystal growing, interprets main structure and characteristic of the puller.
单晶炉是生长大规模集成电路所需要硅单晶的专用设备。本文主要介绍了单晶炉的真空系统与充气系统的设计。
The single crystal furnace is a special equipment of growth single crystal for LSI. This paper mainly introduces the design of vacuum system and charge system of crystal furnace.
本文结合单晶炉提拉系统实际工作情况，对单晶炉提拉系统的摆动量的检测方法进行了研究，提出了基于计算机视觉的运动轨迹检测方案。
In this paper, detection scheme is researched based on the practical condition of lifting system. And a vision detection scheme was formed to detect the swing parameter.
单晶硅炉的自动化控制系统，具有国际先进水平。
Silicon furnace automation control systems, with the advanced international level.
介绍了钼和钼-铌单晶的制备原理、制备工艺及电子束区域熔炼炉组成结构。
Preparing principle and preparation technology of Mo and Mo-Nb alloy single crystal and structure and component of electron beam floating zone melting are introduced.
单晶硅炉加热电源是一种大功率的整流电源，其输出的能量直接为单晶硅炉内的石墨加热器供热，为单晶硅的生产提供热场；
Monocrystalline silicon furnace heating power supply is a kind of high power AC/DC converter, it is used to provide energy for the graphite heater inside the Monocrystalline silicon furnace.
炉是生长大规模集成电路所需要硅单晶的专用设备。
The single crystal furnace is a special equipment of growth single crystal for LSI.
本实用新型涉及一种用于单晶硅炉、硅芯炉设备的无锁紧装置的空心轴磁流体密封装置。
The utility model relates to a hollow shaft magnetic fluid sealing device of a non-locking device used for a single crystal silicon furnace and silicon chip furnace equipment.
TDR—JN系列全自动晶体生长炉是采用直拉法生长单晶硅材料的专用设备。
Introduction: TDR-JN series of automatic crystal growing furnace are special equipment applied with Czochralski Technique for Silicon Single crystals materials growing.
TDR—JN系列全自动晶体生长炉是采用直拉法生长单晶硅材料的专用设备。
Introduction: TDR-JN series of automatic crystal growing furnace are special equipment applied with Czochralski Technique for Silicon Single crystals materials growing.
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