文章提出了一种实用的单晶炉提拉速度控制系统。
This paper proposes a practical speed control system for single crystal furnace lifting mechanism.
炉是生长大规模集成电路所需要硅单晶的专用设备。
The single crystal furnace is a special equipment of growth single crystal for LSI.
炉是生长大规模集成电路所需要硅单晶的专用设备。
The single crystal furnace is a special equipment of growth single crystal for LSI.
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