• 微波等离子化学气相沉积装置中,研究了负偏压形核对金刚石薄膜WC 6 %硬质合金刀具附着力影响

    The influence of bias enhanced nucleation(BEN) to the adhesion between diamond coating and WC-6%Co carbide cutting tool is researched with the microwave plasma (CVD) instrument.

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  • 直接施加于试样脉冲偏压等离子特性没有明显影响存在着一定溅射作用。

    The influence of negative pulse voltage applied directly to stainless steel samples on plasma characteristics has been found to be negligible, except sample sputtering.

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  • 采用过滤阴极真空电弧技术并施加一定的衬底偏压P(100)单晶硅片上制备出四面非晶薄膜

    Tetrahedral amorphous carbon (ta-C) films have been deposited on P-type (100) polished c-silicon wafer with different substrate negative bias by filtered cathodic vacuum arc technology.

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  • 进一步提高沉积速度灯丝施加相对基底夹持器偏压,使得在基底灯丝组之间DC等离子得以保持

    To further increase deposition rates, the filament array is biased negatively with respect to the substrate holder so that a DC plasma is also maintained between the substrate and filament array.

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  • 微波等离子化学气相沉积金刚石膜时,采用偏压使离子轰击金刚石膜表面。

    The hydrogen and boron ion bombardments were performed by applying a negative bias voltage to the substrate during microwave plasma chemical vapor deposition process.

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  • 采用调节射频感性耦合等离子基片电极之间外部电路阻抗方法,控制基片电极的射频自偏压

    The RF self-bias of the substrate in an RF inductively coupled plasma is controlled by changing the impedance of an external circuit inserted between the substrate and the ground.

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  • 采用调节射频感性耦合等离子基片电极之间外部电路阻抗方法,控制基片电极的射频自偏压

    The RF self-bias of the substrate in an RF inductively coupled plasma is controlled by changing the impedance of an external circuit inserted between the substrate and the ground.

    youdao

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