论著成果
[1]刘晓为等, 硼掺杂多晶硅薄膜电阻率的温度特性, 半导体学报, 1994,15(6):429-434
[2]Liu Xiao-wei, et al, A New Water Permeability Sensor for Test of Thin Films, J.of Micromech..& Microeng., 1995, 5: 147-149
[3]刘晓为等, 电容式加速度传感器的计算机模拟, 压电与声光, 2001.10:170~172
[4]Liu Xiao-wei, et al. Computer Simulation of Polysilicon Pressure Sensors: Min Zhang.1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY. ICSICT’98. BeiJing.1998.IEEE.1998.10.
[5]Liu Xiao-wei, et al. High Temperature Pressure and Temperature Multifunction Sensors: Min Zhang.1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY. ICSICT’98. BeiJing.1998.IEEE.1998.10.
[6]Liu Xiao-wei, et al. Investigation of KOH Etching for Improving Surface quality: Min Zhang.1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY. ICSICT’98. BeiJing.1998.IEEE.1998.10.
[7]Liu Xiao-wei, et al. Simulation of Piezoelectric Driven Diaphragms of Micropumps: FOURTH INTERNATIONAL CONFERENCE ON ELECTRONIC MEASUREMENT & INSTRUMENTS. ICEMI’99. Harbin.1999.EMI & HIT.1999.08.
[8]Liu Xiao-wei, et al, Investigation of Piezoresistive Effect of Polysilicon Films in High Temperature: PACIFIC RIM WORKSHOP ON TRANSDUCERS AND MICRO/NANO TECHNOLOGIES. Xia Men, 2002.07.
[9]Liu Xiao-wei, et al, Polysilicon SOI Pressure Sensor with Self-Testing Function: PACIFIC RIM WORKSHOP ON TRANSDUCERS AND MICRO/NANO TECHNOLOGIES. Xia Men, 2002.07.
[10]Liu Xiao-wei, et al, Simulation of bulk micromachined vibration sensor with low noise: International Symposium on Micro technology. SPIE. Spain.2003.05.
