本文介绍其机械结构的主要部件，包括高精度主轴、高精度定位系统、减震平台等。

This paper describes its mechanical structure including a high precision spindle, a high precision positioning system, an air-mounting deck, etc.

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独特的定位结构及高精度的光路系统，有效保证测量值的正确性及重复性。

C, unique localization structure and precision high mere distance system, guarantee the exactness and repetitiveness of the measurement value effectively.

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本文提出了一种机器人高精度定位补偿系统，介绍了一种位姿误差补偿方法。

This paper presents a method of robot position error compensation and introduces a high precision positioning system of robot.

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