...真空度； 粗/低真空泵(Rough/Low vacuum pump):从大气压力开始并用来获得 低真空度的真空泵； 高真空泵(High vacuum pump):在高真空范围工作的真空泵； 超高真空泵(Ultrahigh vacuum pump):在超高真空范围工作的真空泵； 增压真空泵(Booster vacu...
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可单独作低真空泵用，也可与其他高真空泵组合作前级泵用；
Used either solely as Rough Pumps, or in combination with other high vacuum pumps as Backing Pumps.
在适当的压强下，工艺室被接通高真空泵系统抽气，以继续降低工艺室的压强。
At the appropriate pressure, the chamber is opened to a high-vacuum pumping system that continues to reduce the pressure of the process chamber.
由于罗茨泵是一种无内压缩的真空泵，通常压缩比很低，故高、中真空泵需要前级泵。
As the Roots pump is a non-vacuum inside the compression, the compression ratio is usually very low, so high, medium and vacuum pumps need to pump before.
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