简要介绍了等离子体技术和微细加工技术。
Plasma technology and micro process technology are presented simply.
微波电子回旋共振等离子体是淀积薄膜、微细加工和材料表面改性的一种重要手段。
The microwave electron cyclotron resonance (ECR) plasma is one of the most important means for depositing thin films and microfabrications as well as surface modifications of materials.
微细的纳米结构令涂层和刀体附着力更强，涂层的表面更光滑，刀刃更加锋利，加工时达到较低的磨擦系数。
Fine structure of the nano-coating and knife body stronger adhesion, coating the surface more smooth, more sharp blade, process to achieve the low coefficient of friction.
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