浅沟槽隔离 STI
The isolation grooves between LED pixels are of central importance in LED-array technique, which is the basic of fabrication of micro LED display device.
LED阵列技术是制备这种器件的核心技术,而能否在相邻的像素之间制作出良好的隔离沟槽又是LED阵列技术的关键所在。
参考来源 - LED微显示器件的设计和隔离沟槽的制作研究·2,447,543篇论文数据，部分数据来源于NoteExpress
腐蚀后的上隔离沟槽边缘平整，其深度和宽度可以解决注入电流在相邻像素之间产生的干扰问题。
The edges of the grooves after etching are plane and smooth. The depth and width of the grooves can solve the interference problem induced by the injection current between the adjacent pixels.
本文介绍油隔离泵阀箱渗漏的原因，能过对阀盖O型圈沟槽的改进及采取乐泰密封胶替代牛油盘根进行密封，解决了阀箱渗漏的问题。
This paper introduces the cause of the seepage in valve box of oil isolation pump, and solves the problem of the valve box seepage by way of the improvement of die slot in O - ring and seal material.
对于形成在氧化物隔离层上的器件，多晶填充的沟槽理想地穿透该隔离层从而改进从有源区到衬底的热传导。
For devices formed on an oxide isolation layer, the poly - filled trench desirably penetrates this isolation layer thereby improving thermal conduction from the active regions to the substrate.
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