降低了旋转传感器组件所需的工时，减少了组件数量，并实现了一个更紧凑的房屋尺寸。
Reduces man-hours required for rotation sensor assembly, reduces the number of components and achieves a more compact housing size.
提供了一种简化的且成本降低的基板传送装置，其中减少了用于检测基板位置的传感器的数量。
Provided is a simplified and low-cost substrate transfer apparatus wherein the number of sensors for detecting position of a substrate is reduced.
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