外加反向电压至闸极g。
本论文中,我们尝试使用一氧化二氮电浆氮化处理,以改善二氧化铪闸极介电层的品质。
In this thesis, we try to use post-deposition N2O plasma nitridation to improve the HfO2 film quality.
这些效能改进的原因可以归之于经过表面处理后,闸极漏电流的降低以及载子注入的减少。
The improvements are most likely due to the reduction of the gate leakage current and the charge injection effect.
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