AB法是一种比较先进的监控方法，通过变换监控片和移动监控波长，把每层膜的镀制停点选择在灵敏位置。
AB method is much advanced in monitoring the thickness. Through the switch of monitoring glass and appropriate choice of wave length, stop point of each layer was located in sensitive position.
多个沉积源的选择和任意功率值的预设以及灵活的编程功能，可以控制达99层膜系的镀制。
It offers free selection of multiple deposition sources, setting power at any level, flexibility of deposition sequence edition and ability to control up to 99 layers.
提出了选择合适镀硬铬替代工艺的要求。
The requirements for selecting qualified alternative processes were presented.
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