... light pressure separator 低压分离器 Light Pressure Intercooled Turbo 轻压中冷式涡轮鼓风增压 selective light pressure 选择光压 ...
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在抛光工艺中,抛光液的种类、抛光垫的选择、抛光压力、温度、抛光盘转速、加工时间等诸多条件都是决定抛光质量的重要因素。
Thirdly, the parameters deciding the quality in polishing process are as follows: slurry, polish pad, pressure, temperature, rotation speed, wafering time, and so on.
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