ultra-precision machine;unloading system;structure design;straightness measurement;
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超精密数控机床 ultra-precision CNC machine tool
Precision and ultra-precision machine tool play a crucial role in research of ultra-precision machining.
精密和超精密机床在超精密加工技术的研究和发展过程中起着决定性的作用。
参考来源 - 基于压电陶瓷的步进式进给机构的研制·2,447,543篇论文数据，部分数据来源于NoteExpress
超精密电主轴是超精密机床的关键技术之一。
Ultra precise spindle is one of the key technologies of ultra precise machine tool.
纳米级分辨率的运动是当今超精密机床精度指标的特征标志。
Motion resolution in nanometer scale is the important characteristic indicator of ultra-precision machine tool.
超精密机床伺服系统中，间隙非线性环节是影响系统性能的主要原因。
In precision machine tool servo control system, the existence of non-linear backlash element is the main factor that affects the performance of the control system.
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