该谱仪系统由三部分组成，电离室主体、充气系统及电子学系统。
The system is composed of main body of the chamber, gas-filled and electronics system.
睿米的氦质谱检漏仪维修，代表着国内最高水平。我们的维修可以做到电路级别，质谱室级别，国内唯一。
RealMeter represents the highest industrial-level, especially for some famous helium leak detector brand. RealMeter is the onlyone whose maintenance can be done at the circuit level in China.
实际建立的系统包括激光器、外光路系统、真空制样室、俄歇能谱仪、电子发射测量仪。
The total system comprise laser, external ray system, vacuum chamber, AES and emission electron surveyor.
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