电子散斑干涉测量技术通过在被测物体表面产生干涉条纹(载频调制条纹)，分析位移场与物面高度之间的关系，可测量物面的形貌。

ESPI can measure the object, through forming a carrier pattern on the object surface (carrier pattern modulation), analyze the relation between displacement field and altitude of the object surface.

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本文提出了一种基于数字调制和解调技术的电容式位移传感器的设计方法。

This paper presents a design method of capacitance displacement sensor based on digital synthesis technology.

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根据调制解调的频谱转移特性，提出了有效位移噪声是高斯窄带噪声。

According to frequency spectrum transfer characteristic of modulation and demodulation, we think the position measurement noise is Gaussian narrowband noise.

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