实验结果表明，金刚石薄膜在上述衬底材料上的成核特点和成核机制不同。
And the experimental results show that diamond films nucleation feature and mechanism are different on different above mentioned substrate materials.
针对有机半导体材料的蒸发温度低的特点，设计并制作了低温辐射式加热器和衬底加热器。
A low-temperature radiation heater and substrate heater are designed and made aiming at the low evaporating temperature of organic semiconductor materials.
叙述了硅基传感器微机械加工的特点和要求，简要说明了硅衬底微细加工的常用方法。
The characteristics and requests of micromachining for silicon based sensors are introduced. The conventional methods of si substrate microfabrication are briefly described.
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