substrate strength
... substructure 底层结构 substrate strength 衬底强度 substrate scriber 衬底划线器 ...
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发现适当降低聚焦加热灯强度、提高衬底加热温度可以降低固化前沿温度梯度，从而降低亚晶界等缺陷密度。
It is found that the temperature gradient of solidifying front edge could be reduced by reducing focused lamp intensity and increasing substrate temperature.
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