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分别考虑了深浅两次沟道区注入杂质在氧化扩散过程中对表面浓度的贡献。
For double channel implantations with different depths, different contributions of the implanted impurities during oxide diffusion to the surface concentrations are studied in the paper.
测定了有效扩散素数、传质系数、吸附和脱附速率常数、平衡常数和饱和表面浓度。
Effective diffusivities, mass transfer coefficients, adsorption and desorption rate constants, equilibrium constants, saturated surface concentrations have been determined.
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