认为光纤象面全息图可以获得较高衍射效率和分辨率，并对此进行了实验验证。
It is verified experimentally that higher diffraction efficiency and resolution can be obtained by optical fiber image plane hologram.
光刻过程中由于光的衍射效应产生的非线性畸变对光刻面形质量具有严重影响，是造成光刻微结构图形失真的主要原因之一。
Nonlinear distortion caused by diffraction in the lithography process has severely affected the quality of surface profile, which is the main reason for pattern distortion in lithography.
模拟计算了超短脉冲波场入射下其衍射层析的角分布与面分布。
The Angle distribution and plane distribution of the diffraction tomography with ultrashort pulse incident wave was simulated.
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