根据波动光学的理论，对菲涅耳近场衍射公式误差相位的影响进行了分析。
Brsed on the wave theory of optics, the affect caused by the phase error in Fresnel near-field diffraction equation is analysed.
运用改进模型测量细圆柱体直径时，克服了传统测量模型由衍射角引起的原理误差，提高了测量精度。
Theoretical error of customary model created by diffraction Angle is eliminated so that the measurement accuracy is improved when the diameter is measured with the improved model.
分析了用夫朗荷费衍射测量微小尺寸的原理误差，包括夫朗荷费近似误差和极值特征点位置探测误差。
Analyzes the principle errors in measuring small dimensions by Fraunhofer diffraction, including Fraunhofer approximation error and the place detecting error of extreme value characteristic aspect.
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