分析了用夫朗荷费衍射测量微小尺寸的原理误差，包括夫朗荷费近似误差和极值特征点位置探测误差。
Analyzes the principle errors in measuring small dimensions by Fraunhofer diffraction, including Fraunhofer approximation error and the place detecting error of extreme value characteristic aspect.
同时，利用上述结论提出了一种新颖的衍射测量方法，能够有效地简化仪器结构，提高测量精度，扩展测量范围。
Moreover a new measurement method based on the result mentioned above is developed that can simple the structure of instrument, increase measurement, extend measurement range.
这两种多层膜经透射电子显微镜和小角X射线衍射测量证明构成多层膜的单层膜上的纳米金颗粒是有序的，并且颗粒在层与层之间的排列也是有序的。
The two multilayers had ordered particles both on planes and in layer by layer, which were confirmed by TEM images and small-angle X-ray diffraction measurement.
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