《蝇眼》是吉林出版社出版的图书，作者是邱华栋。
接近式光刻中一般采用柯勒照明系统，并采用蝇眼透镜形成多点光源均匀掩模面的光场分布。
Kohler illumination was used in proximity lithography, and a flys eye lens was adopted to form multi-point source in order to uniform the light intensity on the mask plane.
同时针对实际光源的计算机建模进行了阐述 ，给出了蝇眼透镜阵列照明系统的设计方法和设计实例。
This paper also explicates the computer modeling based on the actual light source, and presents the design method and cases.
本发明的反射蝇眼式光束均匀器，具有加工难度小，对加工材料要求不高，价格低廉，全反膜的损耗也很小。
Features of the invention are: easy of manufacture, not high requirement for material, and low loss of total reflection film.
应用推荐