首先，利用扁壳的无矩理论得到了平坦薄膜结构的基本力学方程。
First, the fundamental equations of flat membrane structures are obtained by applying the non-moment theory of thin shallow shells.
然而溅射工艺参数的选取以及沉积的薄膜结构和性能是人们主要关注的课题。
However, it is still a question how to determine sputtering process parameters, microstructure and properties of thin films.
文中揭示的薄膜结构静力性能规律，为膜结构设计提供了有益的帮助。
The mechanical property of membrane revealed in this paper as well as the practical engineering introduced would for sure do great help to future membrane structure design.
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